<span style="font-size: 12pt;">★ It is consisted XYZ manual positioning stage, a tilt stage (θx, θy) and a goniometer stage(θz). It is a 6-axis high resolution positioning stage to be designed to perform the single-fiber positioning or as the application for industry of optical waveguide.</span> <br /><span style="font-size: 12pt;">★ Available potion with ordering code - M5E-2000B-R-[XYZ module: MXYZ60-ACSR、Tilt module: MTR60-45R、α-axis stage: MXG6-50VMR]</span>">
Update:2022.7.21
Model No. | M6E-2200B-R | |||||||
Specification | Axis | X | Y | Z | θx | θy | θz | |
Travel Stroke | Rough Tuning | ± 6.5 mm | ± 6.5 mm | ± 6.5 mm | ± 3 ° | ± 3 ° | ± 4 ° | |
Fine Tuning | ± 0.3 mm | ± 0.3 mm | ± 0.3 mm | |||||
Accuracy | Rough Tuning | 10 μm | 10 μm | 10 μm | ≒ 29.3" / Vernier | ≒ 27.8" / Vernier | ≒ 33" / Vernier | |
Fine Tuning | 0.5 μm | 0.5 μm | 0.5 μm |
Feed Position |
Characterisitc of Different Guiding Type |
The Main Feeding Mode of Mini Stages |