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    GAS03 Series


    ★ Light-weight and Extra-thin-It creates the wing-free thin & lighter mechanism by applying the XYθ module.
    ★ The cross-roller bearings have been pre-loaded, to perform the whole unit high precision and rigidity.
    ★ Hollow structure-It can be used for the optical inspection devices or conduction tester.
    ★ Longer usage life and reliable accuracy of the Alignment stage itself is guaranteed by lubrication.
    ★ All products are Cryogenic Treatment. It can not only significantly upgrade the toughness and operation lifetime but also improve the dimension stability of materials.
    ★ 3D CMM- Ensure the quality and precision of the stage.
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    Update:2018.06.06

    Model no.

    Stage size (mm)

    Base size (mm)

    Travel stroke (mm)

    Angle(θ)

    Parallel Loading Capacity(kgf)

    Repeatability Accuracy(um)

    GAS03-1000CC

    1000x1000

    1200x1200

    ±15x±15

    ±2°

    160

    UP:±1 
    P:±5

    GAS03-1000RS

    1000x1000

    1200x1200

    ±15x±15

    ±2°

    200

    UP:±1 
    P:±5

    GAS03-1500CC

    1500x1500

    1700x1700

    ±15x±15

    ±2°

    160

    UP:±1 
    P:±5

    GAS03-1500RS

    1500x1500

    1700x1700

    ±15x±15

    ±2°

    200

    UP:±1 
    P:±5