Model No.
AXYR120-A2PR-ND
Table Size
Ø120
Travel Stroke X-Axis
±15mm
Travel Stroke Y-Axis
±15 mm
Travel Stroke θ-Axis
±10°
Drive Type
Ball Screw
XY Rail
Crossed Roller Guiding
θ Rail
Circular Linear Ball Guiding
Stage Material/Surface Treatment
Aluminum Alloy / Black Andoized
Accuracy Level
P: Precision
XY Axis Resolution
5 μm
2.5 μm
θ Axis Resolution (Pulse)Full/Half
0.0034°
0.0017°
XY Axis Maximum(Full Step)
10 mm / sec
θ Axis Maximum(Full Step)
8° / sec
XY Axis Repeatability Precision
±1 μm
θ Axis Position Precision
0.05°
θ Axis Repeatability Precision
Load Capacity
25 kgf
XY Axis Missed Step
2 μm
θ Axis Missed Step
0.01°
Parallelism
30 μm
Dynamic Straightness
20 μm
Dynamic Parallelism
15μm
Motor Type
2MS-N28D45A
Motor Brand
GMT
Update:2022.02.07